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Interference method for ultra-precision measurement and compensation of laser beam angular deflection

机译:超精密测量的干涉法和激光束角偏转的补偿

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摘要

A new interferometric method for ultra-precise measurement of laser-beam angular deflection is proposed. The angular tilt of a measuring device in relation to the beam axis also can be measured. The method is based on interference fringe period analysis in the selected plane of measurement. The theoretical basis and experimental verification of the method are presented. It is shown that by using the proposed technique, it is possible to measure the laser beam angular deflection or instability with ultrahigh resolution reaching single nanoradians. The proposed method allows the measurement and further compensation of laser beam deflections in a very compact design.
机译:提出了一种新的干涉测量方法,用于激光束角偏转的超精密测量。还可以测量测量装置相对于光束轴线的角度倾斜。该方法基于所选测量平面中的干涉条纹周期分析。提出了该方法的理论基础和实验验证。结果表明,通过使用所提出的技术,可以以达到单个纳弧度的超高分辨率测量激光束的角偏转或不稳定性。所提出的方法允许以非常紧凑的设计来测量和进一步补偿激光束偏转。

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