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Interferometric homogeneity test using adaptive frequency comb illumination

机译:使用自适应频率梳照明的干涉均匀性测试

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The homogeneity test of glass plates in a Fizeau interferometer requires the measurement of the glass sample in reflected as well as in transmitted light. For the measurement in transmitted light, the sample has to be inserted into the ray path of a Fizeau or Twyman-Green interferometer, which leads to a nested cavity setup. To separate the interference signals from the different cavities, we illuminate a Fizeau interferometer with an adaptive frequency comb. In this way, rigid glass plates can be measured, and linear variations in the homogeneity can also be detected. The adaptive frequency comb is provided by a variable Fabry-Perot filter under broadband illumination from a superluminescence diode. Compared to approaches using a two-beam interferometer as a filter for the broadband light source, the visibility of the fringe system is considerably higher.
机译:在Fizeau干涉仪中对玻璃板进行均质性测试需要在反射光和透射光下测量玻璃样品。为了在透射光下进行测量,必须将样品插入Fizeau或Twyman-Green干涉仪的射线路径中,这会导致嵌套腔设置。为了从不同的腔中分离出干扰信号,我们用自适应频率梳照亮了一个Fizeau干涉仪。以此方式,可以测量刚性玻璃板,并且还可以检测均匀性的线性变化。自适应频率梳由可变Fabry-Perot滤波器在超发光二极管的宽带照明下提供。与使用两光束干涉仪作为宽带光源的滤光片的方法相比,条纹系统的可见度更高。

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