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Three-dimensional shape measurement of large-aperture aspheric mirrors by off-axis null Ronchi test

机译:大孔径非球面镜的三维形状离轴零Ronchi测试

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摘要

An off-axis null Ronchi test is presented to measure the three-dimensional (3D) shape of a large-aperture aspheric mirror. The method designs curved fringe patterns as null sinusoidal gratings by means of phase information and ray tracing. In the process of measurement, the curved fringe patterns are displayed on a transmission-type liquid crystal display (T-LCD) screen, and a CCD camera records the fringe patterns containing the information of deviations of the mirror. The slopes of the deviations of the mirror are obtained by using the recorded fringe patterns. The deviations are restored by integrating, and then the 3D shape of the mirror can be reconstructed. Compared with the classical null Ronchi test, the method can provide enough measured data points and avoid the jagged edges of bands on the null gratings. Moreover, the method can conveniently change period and direction of the curved fringes and accurately control phase shifting. Computer simulations and a preliminary experiment are presented to show the performance of the method.
机译:提出了离轴零Ronchi测试来测量大孔径非球面镜的三维(3D)形状。该方法通过相位信息和光线跟踪将弯曲条纹图案设计为零正弦光栅。在测量过程中,弯曲的条纹图案显示在透射型液晶显示器(T-LCD)屏幕上,并且CCD摄像机记录包含镜面偏差信息的条纹图案。通过使用所记录的条纹图案来获得镜的偏差的斜率。通过积分恢复偏差,然后可以重建反射镜的3D形状。与传统的空Ronchi测试相比,该方法可以提供足够的测量数据点,并且可以避免空光栅上的带锯齿状边缘。而且,该方法可以方便地改变弯曲条纹的周期和方向,并精确地控制相移。计算机仿真和初步实验表明了该方法的性能。

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