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Parallel phase-shifting interferometry based on Michelson-like architecture

机译:基于类迈克尔逊架构的并行相移干涉术

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摘要

In this paper, we present a new scheme for parallel phase-shifting interferometry that employs a Michelson-like architecture and a simple polarization unit to generate two phase-shifting interferograms with phase shift of pi/2 at a single camera exposure. The parallel phase-shifting unit is built with simple optical components, and the distance between the parallel interferograms can be adjusted conveniently. Phase reconstruction is performed by using an algorithm developed for two-step phase-shifting interferometry. The practicability of the proposed configuration and the reconstruction method is demonstrated by experiments.
机译:在本文中,我们提出了一种并行相移干涉术的新方案,该方案采用了类似迈克尔逊的架构和简单的偏振单元,可以在一次相机曝光时生成两个具有pi / 2相移的相移干涉图。平行相移单元由简单的光学组件构成,平行干涉图之间的距离可以方便地调节。通过使用为两步相移干涉术开发的算法来执行相位重建。实验证明了所提出的结构和重构方法的实用性。

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