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Measurement of the surface profile of an axicon lens with a polarization phase-shifting shearing interferometer

机译:用偏振相移剪切干涉仪测量轴锥透镜的表面轮廓

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摘要

We present a Twyman-Green interferometer (TGI)-based polarization phase-shifting shearing interferometric technique for testing the conical surface of an axicon (AX) lens. In this technique, the annular beam generated due to the passing of an expanded collimated laser beam traveling along the axis of revolution of the transparent glass AX element is split up into its reflected and transmitted components, having the plane of polarization in the orthogonal planes, by the polarization beam splitter (PBS) cube of the TGI-based optical setup. The split-up components are made to travel unequal paths along the two arms of the TGI and are recombined by the PBS. Because of the difference in path lengths traveled by the annular conical beams, a linear shear is introduced along the radial direction between the interfering components. Thus, the resulting interference pattern gives a map of the optical path difference (OPD) between two successive close points along a radial direction on the conical surface of the AX lens. The OPD map along radial directions, and hence the slopes/profiles of the conical surface, are obtained by applying polarization phase-shifting interferometry. Results obtained for an AX lens are presented.
机译:我们提出了一种基于Twyman-Green干涉仪(TGI)的偏振相移剪切干涉技术,用于测试轴锥(AX)透镜的锥形表面。在该技术中,由于沿透明玻璃AX元件的旋转轴传播的扩展准直激光束的通过而产生的环形光束被分解为其反射和透射分量,在正交平面中具有偏振面,由基于TGI的光学装置的偏振分束器(PBS)立方体组成。拆分后的组件将沿着TGI的两条臂以不等的路径行进,并被PBS重组。由于环形锥形束所行进的路径长度不同,因此沿径向方向在干扰分量之间引入了线性剪切。因此,所得的干涉图案给出了沿AX透镜的圆锥形表面上的径向方向的两个连续的闭合点之间的光程差(OPD)的图。沿径向的OPD映射以及圆锥表面的斜率/轮廓通过应用偏振相移干涉仪获得。给出了AX镜头获得的结果。

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