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Tilt scanning interferometry: a numerical simulation benchmark for 3D metrology

机译:倾斜扫描干涉仪:3D计量的数值模拟基准

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摘要

Tilt scanning interferometry (TSI) is a novel experimental technique that allows the measurement of multicomponent displacement fields inside the volume of a sample. In this paper, we present a simulation model that allows for the evaluation of the speckle fields recorded in TSI when this technique is applied to the analysis of semitransparent scattering materials. The simulation is based on the convolution of the optical impulsive response of the optical system and the incident field amplitude. Different sections of the simulated imaging system are identified and the corresponding optical impulsive responses are determined. To evaluate the performance of the proposed model, a known internal displacement field as well as the illumination and detection strategies in a real TSI system are numerically simulated. Then, the corresponding depth-resolved out-of-plane and in-plane changes of phase are obtained by means of the data processing algorithm implemented in a TSI system.
机译:倾斜扫描干涉仪(TSI)是一种新颖的实验技术,可以测量样品体积内的多分量位移场。在本文中,我们提出了一种仿真模型,当将该技术应用于半透明散射材料的分析时,该模型可以评估TSI中记录的散斑场。该模拟基于光学系统的光学脉冲响应和入射场幅度的卷积。识别模拟成像系统的不同部分,并确定相应的光学脉冲响应。为了评估所提出模型的性能,数值模拟了一个已知的内部位移场以及真实TSI系统中的照明和检测策略。然后,借助在TSI系统中实现的数据处理算法,获得相应的深度分辨平面外和平面内相位变化。

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