Wavefront measurements of phase plates combining a point-diffraction interferometer and a Hartmann-Shack sensor

摘要

A dual setup composed of a point diffraction interferometer (PDI) and a Hartmann-Shack (HS) wavefront sensor was built to compare the estimates of wavefront aberrations provided by the two different and complementary techniques when applied to different phase plates. Results show that under the same experimental and fitting conditions both techniques provide similar information concerning the wavefront aberration map. When taking into account all Zernike terms up to 6th order, the maximum difference in root-mean-square wavefront error was 0.08 (mu)m, and this reduced up to 0.03 (mu)m when excluding lower-order terms. The effects of the pupil size and the order of the Zernike expansion used to reconstruct the wavefront were evaluated. The combination of the two techniques can accurately measure complicated phase profiles, combining the robustness of the HS and the higher resolution and dynamic range of the PDI.