A microvalve is a key part in a multilayer microfluidic device to control the fluid flow, and its thickness directly determines its performance. In this paper, a three-dimensional measurement technology using a white-light confocal microscope is developed for measuring both the topography and thickness of micro-valves. The impact of system parameters and sample parameters on measurement accuracy is discussed in detail, particularly for measurement with a dry objective. With this technique, the microvalve thicknesses before and after bonding were characterized with submicrometer measurement sensitivity and about 1 (mu)m measurement accuracy.
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