Modeling, fabrication, and characterization of tungsten silicide wire-grid polarizer in infrared region

摘要

We designed and fabricated a tungsten silicide wire-grid polarizer. To examine its polarization characteristics, the transmission spectra of the polarizer were simulated using the effective medium theory. The polarizer was fabricated based on the simulation results. The transverse magnetic (TM) polarization transmittance of the fabricated polarizer was greater than 50percent over the 5 (mu)m wavelength, and the ratio of TM and transverse electric transmittance was greater than 100 (20 dB) in the infrared range. This fabricated polarizer has higher durability and better compatibility with microfabrication processes than conventional infrared polarizers.