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Deterministic convergence in iterative phase shifting

机译:迭代相移中的确定性收敛

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摘要

Previous implementations of the iterative phase shifting method, in which the phase of a test object is computed from measurements using a phase shifting interferometer with unknown positions of the reference, do not provide an accurate way of knowing when convergence has been attained. We present a new approach to this method that allows us to deterministically identify convergence. The method is tested with a home-built Fizeau interferometer that measures optical surfaces polished to lambda/100 using the Hydra tool. The intrinsic quality of the measurements is better than 0.5 nm. Other possible applications for this technique include fringe projection or any problem where phase shifting is involved.
机译:迭代相移方法的先前实现方式(其中测试对象的相位是使用具有参考位置未知的相移干涉仪根据测量结果来计算的),无法提供知道何时达到收敛的准确方法。我们为这种方法提出了一种新方法,它使我们能够确定性地确定收敛性。使用自制的Fizeau干涉仪对该方法进行了测试,该干涉仪使用Hydra工具测量抛光至λ/ 100的光学表面。测量的固有质量优于0.5 nm。该技术的其他可能应用包括条纹投影或涉及相移的任何问题。

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