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Multilayer structure for a spectral imaging sensor

机译:光谱成像传感器的多层结构

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摘要

We investigate the possibility of recovering spectral information using a multilayer structure realized through microelectronics technologies and compatible with a matrix arrangement. The structure is made of photoabsorbing layers, acting as local photodetectors, alternating with transparent layers. The whole structure lies on a reflective surface. A stationary wave containing the spectral information of the source is generated within the structure. We determine the intensity of the stationary wave at any position, taking into account absorption and multireflections at each transition as well as the signal detected by the photoabsorbing layers. The model forecasting the detected signal is then validated using p-i-n diodes of different thicknesses made of hydrogenated amorphous silicon (a-Si:H) encompassed between indium tin oxide (ITO) electrodes. The detected signal depends on the wavelength of the incident light, the thickness of the detecting layer, and the latter's position within the structure. A specific spectral response can then be associated to each photoabsorbing layer. We show how spectral information can be retrieved from this kind of structure in the visible spectrum range.
机译:我们研究使用通过微电子技术实现并与矩阵排列兼容的多层结构恢复光谱信息的可能性。该结构由充当局部光电探测器的光吸收层与透明层交替构成。整个结构位于反射表面上。在结构内会生成包含源光谱信息的固定波。考虑到每个跃迁处的吸收和多次反射以及光吸收层检测到的信号,我们可以确定任何位置的驻波强度。然后使用包含在氧化铟锡(ITO)电极之间的氢化非晶硅(a-Si:H)制成的不同厚度的p-i-n二极管对预测检测到的信号的模型进行验证。检测到的信号取决于入射光的波长,检测层的厚度以及后者在结构中的位置。然后可以将特定的光谱响应与每个光吸收层相关联。我们展示了如何在可见光谱范围内从这种结构中检索光谱信息。

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