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Inspection of commercial optical devices for data storage using a three Gaussian beam microscope interferometer

机译:使用三高斯光束显微镜干涉仪检查用于数据存储的商用光学设备

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摘要

Recently, an interferometric profilometer based on the heterodyning of three Gaussian beams has been reported. This microscope interferometer, called a three Gaussian beam interferometer, has been used to profile high quality optical surfaces that exhibit constant reflectivity with high vertical resolution and lateral resolution near lambda. We report the use of this interferometer to measure the profiles of two commercially available optical surfaces for data storage, namely, the compact disk (CD-R) and the digital versatile disk (DVD-R). We include experimental results from a one-dimensional radial scan of these devices without data marks. The measurements are taken by placing the devices with the polycarbonate surface facing the probe beam of the interferometer. This microscope interferometer is unique when compared with other optical measuring instruments because it uses narrowband detection, filters out undesirable noisy signals, and because the amplitude of the output voltage signal is basically proportional to the local vertical height of the surface under test, thus detecting with high sensitivity. We show that the resulting profiles, measured with this interferometer across the polycarbonate layer, provide valuable information about the track profiles, making this interferometer a suitable tool for quality control of surface storage devices.
机译:最近,已经报道了基于三个高斯光束的外差的干涉轮廓仪。这种显微镜干涉仪被称为三高斯光束干涉仪,已被用于对高质量光学表面进行轮廓分析,这些光学表面在λ附近具有恒定的反射率,高的垂直分辨率和横向分辨率。我们报告了使用这种干涉仪来测量两个用于数据存储的商用光学表面的轮廓,即光盘(CD-R)和数字多功能光盘(DVD-R)。我们将这些数据的一维径向扫描的实验结果包括在内,没有数据标记。通过将设备放置在聚碳酸酯表面朝向干涉仪探头光束的位置进行测量。与其他光学测量仪器相比,该显微镜干涉仪是独特的,因为它使用窄带检测,滤除不想要的噪声信号,并且因为输出电压信号的幅度基本上与被测表面的局部垂直高度成比例,因此可以使用高灵敏度。我们表明,用该干涉仪在整个聚碳酸酯层上测量的所得轮廓提供了有关轨迹轮廓的有价值的信息,从而使该干涉仪成为表面存储设备质量控制的合适工具。

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