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Magneto-optic microscope for visually detecting subsurface defects

机译:磁光显微镜用于目测地下缺陷

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摘要

A visual test method for detecting microdefects under fine surfaces is described. A new MO microscope that has a laser source, a CCD camera, and an exciting coil is developed for this work. A pulse generator supplies an intermittent square pulse to the exciting coil, which can intensify eddy currents yet reduce the working temperature of the exciting coil and sample. The magnetic field variation produced by the imbedded defect causes a rotation of the polarization plane of the reflected beam. Therefore the reflected beam carries an image of the defect, which is received by a CCD camera. The optical arrangement guarantees that no light is reflected back to the laser. The system was tested with a calibrator, which has an artificial subsurface defect; such a test attains a visual detected image. To our knowledge this is the first time an image of a subsurface defect has been distinctly detected with a MO sensor system.
机译:描述了一种用于检测精细表面下的微缺陷的视觉测试方法。为此,开发了一种具有激光源,CCD照相机和激励线圈的新型MO显微镜。脉冲发生器向励磁线圈提供断续的方​​波脉冲,这可以增强涡流,但会降低励磁线圈和样品的工作温度。由嵌入缺陷产生的磁场变化导致反射光束的偏振面旋转。因此,反射光束带有缺陷的图像,该图像由CCD摄像机接收。光学装置确保没有光反射回激光器。该系统使用带有人工地下缺陷的校准器进行了测试;这样的测试可以获得视觉检测到的图像。据我们所知,这是第一次用MO传感器系统清晰地检测出地下缺陷的图像。

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