A triple-sensor multiplexed fiber-optic displacement sensor, which can measure the displacements of three different objects or the three-dimensional displacement of a single object, is introduced. The sensor is based on the principles of optical frequency-modulated continuous-wave interference and frequency-division multiplexing. The beat signals from the individual sensors are assigned in the frequency domain and separated with different electrical bandpass filters. The displacements of objects can be determined simultaneously by detecting the phase shifts of the corresponding signals. The cross talk between the individual sensors is evaluated, and an accuracy of 0.08 (mu)m in a dynamic range of 1000 (mu)m is achieved.
展开▼
