Microstructure of magnesium fluoride films deposited by boat evaporation at 193 nm

摘要

Single layer magnesium fluoride (MgF_(2)) was deposited on fused-silica substrates by a molybdenum boat evaporation process at 193 nm. The formation of various microstructures in relation to the different substrate temperatures and deposition rates were investigated. The relation between these microstructures (including cross-sectional morphology, surface roughness, and crystalline structures), the optical properties (including refractive index and optical loss) and stress, were all investigated. It was found that the laser-induced damage threshold (LIDT) would be affected by the microstructure, optical loss, and stress of the thin film. To obtain a larger LIDT value and better optical characteristics, MgF_(2) films should be deposited at a high substrate temperature (300 deg C) and at a low deposition rate (0.05 nm s~(-1)).