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Simple phase-shifting method in a wedge-plate lateral-shearing interferometer

机译:楔形板横向剪切干涉仪中的简单相移方法

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摘要

A simple phase-shifting method in a wedge-plate lateral shearing interferometer is described. Simply moving the wedge plate in an in-plane parallel direction gives the amount of phase shift required for phase-shifting interferometry because the thickness of a wedge plate is not constant and varies along the wedge direction. This method requires only one additional linear translator to move the wedge plate. The required moving distance for a phase shift of the wave front with this method is of the order of a millimeter, whereas the typical moving distance for another method that uses a piezoelectric transducer is of the order of a wavelength. This method yields better precision in controlling the moving distance than do the other methods.
机译:描述了一种在楔形板横向剪切干涉仪中的简单相移方法。因为楔形板的厚度不是恒定的并且沿着楔形方向变化,所以简单地在平面内平行方向上移动楔形板就给出了相移干涉术所需的相移量。此方法仅需要一个附加的线性平移器即可移动楔形板。用这种方法进行波前相移所需的移动距离约为毫米,而使用压电换能器的另一种方法的典型移动距离约为波长。与其他方法相比,此方法在控制移动距离方面具有更高的精度。

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