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Smart optical sensors for chemical substances based on porous silicon technology

机译:基于多孔硅技术的化学物质智能光学传感器

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摘要

A simple geometry optical sensor based on porous silicon technology is theoretically and experimentally studied. We expose some porous silicon optical microcavities with different porous structures to several substances of environmental interest: Very large red shifts in the single transmission peak in the reflectivity spectrum due to changes in the average refractive index are observed. The phenomenon can be ascribed to capillary condensation of vapor phases in the silicon pores. We numerically compute the peak shifts as a function of the liquid volume fraction condensed into the stack by using the Bruggeman theory. The results presented are promising for vapor and liquid detection and identification.
机译:对基于多孔硅技术的简单几何光学传感器进行了理论和实验研究。我们将具有不同多孔结构的一些多孔硅光学微腔暴露于几种环境相关物质:观察到由于平均折射率的变化,反射率光谱中的单个透射峰出现了非常大的红移。该现象可归因于硅孔中气相的毛细管凝结。使用布鲁格曼理论,我们根据冷凝到烟囱中的液体体积分数来计算峰位移。提出的结果对于蒸气和液体的检测和鉴定很有希望。

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