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Unmasking Photolithography: A Versatile Way to Site-Selectively Pattern Gold Substrates

机译:揭露光刻技术:选择性地在金基板上进行图案化的多功能方法

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摘要

Patterned substrates with well-defined micro- and nanoscale features are central to the development of a broad range of applications and fields, including, but not limited to, microelectronics, solar cell development, and biotechnology. Typically, these applications require the functionalization of inorganic substrates to meet the specific demands of an application. While this is classically achieved using photoresist, lift-off techniques, and chemical etching, one of the methods that has emerged for direct conjugation of active molecules to substrates is thiol-terrninated self-assembled monolayers (SAMs) on gold, silver, copper, palladium, and platinum substrates.
机译:具有明确的微米和纳米级特征的图案化基板对于广泛的应用和领域的发展至关重要,包括但不限于微电子学,太阳能电池开发和生物技术。通常,这些应用需要对无机基材进行功能化以满足应用的特定需求。尽管通常使用光致抗蚀剂,剥离技术和化学蚀刻来实现这一目标,但将活性分子直接缀合到基材上的一种方法是在金,银,铜,钯和铂基板。

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