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首页> 外文期刊>The Journal of the Acoustical Society of America >Field characterization of an air-coupled micromachined ultrasonic capacitance transducer
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Field characterization of an air-coupled micromachined ultrasonic capacitance transducer

机译:空气耦合微机械超声电容传感器的现场表征

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摘要

Investigations into the field characteristics of an air-coupled ultrasonic capacitance transducer have been performed for a range of transducer configurations. The field of a 2-MHz bandwidth silicon backplate capacitance transducer has been scanned in air using a 1-mm-diam miniature detector at frequencies of up to 1.5 MHz. The radiated peak sound-pressure field is compared to theory based on a plane piston approach for various driving signals, namely pulsed and tone burst excitation. Aperture modifications, such as an annulus and a zone plate, have also been investigated and the devices have been shown to behave as predicted by theory.
机译:对于一系列换能器配置,已经对空气耦合超声电容换能器的现场特性进行了研究。使用1毫米直径的微型检测器在高达1.5 MHz的频率下在空中扫描了2 MHz带宽的硅背板电容传感器的场。将辐射的峰值声压场与基于平面活塞方法的理论相比较,以得出各种驱动信号,即脉冲激励和音调突发激励。还研究了孔的修改,例如环空和波带片,并且已证明该装置的性能符合理论上的预期。

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