Syntheses and structures of novel hafnium chloroamido mono-amidinate and mono-guanidinate as precursors for HfO_2 thin film

摘要

The reactions between HfCl_2[N(SiMe_3) _2]_2 and one or two equivalents of [~iPrNC(Me) N~iPr]Li and ~iPr-NCN-~iPr, at room temperature in toluene, gave the novel chloroamido-amidinato-hafnium HfCl[N(SiMe _3)_2]_2[~iPrNC(Me)N~iPr] (1) and chloroamido-guanidinato-hafnium HfCl_2[N(SiMe_3) _2][~iPrNC(N(SiMe_3)_2)N~iPr] (2) compounds, respectively. Compounds 1 and 2 were characterized by NMR and X-ray single crystal diffraction analysis. Their reaction towards alcohol was studied in order to check the dependency between molecular structure and HfO_2 Atomic Layer Deposition (ALD) specifications.