A programmable intraocular CMOS pressure sensor system implant

摘要

We present a programmable intraocular pressure sensor systemnimplant integrated on a single CMOS chip. It contains an on-chipnmicromechanical pressure sensor array, a temperature sensor, readout andncalibration electronics, a ΜC-based digital control unit, and an RFntransponder. The transponder enables wireless data transmission andnwireless power reception, thus making batteryless operation feasible.nThe chip has been fabricated in a 1.2-Μm n-well CMOS processncomplemented by additional processing steps