Analysis of the film thickness dependence of a single-phase unidirectional transducer using the coupling-of-modes theory and the finite-element method

摘要

A coupling-of-modes (COM) analysis is given for the film thickness dependence of a single-phase undirectional transducer (SPUDT), while the finite-element method (FEM) is employed for evaluating all the coefficients of COM equations. The relationship between the directivity and dispersion curves of the transducer is discussed. The theoretical analysis shows that when the electrode finger thickness increases through a threshold value, a mode conversion phenomenon occurs and the value of the reflection phase changes from the positive to the negative. This result predicts that the forward direction of a film thickness difference type SPUDT will move conversely when the electrode film thickness increases through the threshold thickness. A prototype step-type SPUDT, fabricated on 128 degrees Y-X LiNbO/sub 3/ substrate, showed a directivity of 10 dB/transducer at 481.5 MHz, and a low-loss surface acoustic wave (SAW) filter showed a minimum insertion loss of 3.8 dB.