A piezoelectric elastic fin micromotor based on a PbZr/sub 0.53/Ti/sub 0.47/O/sub 3/ thin film driving a micromachined silicon membrane was fabricated and studied. The stator was characterized by interferometry, and a laser set-up was used to measure the angular velocity and acceleration of the motor. The torque, the output power, and the efficiency of the device were extracted from these measurements. Values up to 1020 rpm and 0.94 /spl mu/Nm were observed for the velocity and the torque, respectively, which would be sufficient for a wristwatch application. The present version exhibited an efficiency of 0.17%, which could theoretically be increased to 4.8%.
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机译：制造并研究了基于PbZr / sub 0.53 / Ti / sub 0.47 / O / sub 3 /薄膜的压电弹性翅片微电机，该薄膜驱动了微加工的硅膜。定子通过干涉仪进行了表征，并使用激光装置来测量电机的角速度和加速度。从这些测量中提取出了扭矩，输出功率和设备的效率。速度和扭矩分别达到1020 rpm和0.94 / spl mu / Nm，对于手表应用而言已经足够。当前版本的效率为0.17％，理论上可以提高到4.8％。
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