PZT thin films for microsensors and actuators: Where do we stand?

摘要

This paper reviews deposition, integration, and device fabricationnof PbZrxTi1-xO3 (PZT) films fornapplications in micro-electromechanical systems. An ultrasonicnmicromotor is described as an example. A summary of the published datanon piezoelectric properties is given. The figures of merit for variousnapplications are discussed. Some considerations and results onnoperation, reliability, and depolarization of PZT thin films arenpresented. The state of the art allows some preliminarynconclusions