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On the frequency dependent drain conductance of ion-implanted GaAs MESFETs

机译:离子注入GaAs MESFET的频率依赖性漏极电导

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摘要

The effect of MESFET structure on the frequency dispersion of drain conductance (g/sub d/) was examined, It was found that a shorter gate length, lower buried p-layer concentration, lower sheet resistance of n/sup +/ layer, and thinner active layer thickness are effective in suppressing the frequency dependent g/sub d/. These phenomena are explained by the presence of deep traps in the depletion layer between the semi-insulating substate and active layer. We also show that the cross-point change of eye-pattern for density of input signal in logic ICs is due to frequency dependent g/sub d/ The cross-point change between mark ratio of 1/8 and 7/8 shows a linear relationship with gd/sub RF//gd/sub dc/ (the ratio of the drain conductance at RF and dc input), These results indicate that an optimized device structure with g/sub d/ small frequency dispersion can be used to realize high-speed and high quality logic ICs.
机译:研究了MESFET结构对漏极电导频率色散(g / sub d /)的影响,发现栅极长度更短,埋入p层浓度更低,n / sup + /层的薄层电阻和较薄的有源层厚度可有效抑制与频率有关的g / sub d /。这些现象可以通过在半绝缘子态和有源层之间的耗尽层中存在深陷阱来解释。我们还表明,逻辑集成电路中眼图的输入信号密度的交叉点变化是由于频率相关的g / sub d /。标记比例为1/8和7/8之间的交叉点变化是线性的与gd / sub RF // gd / sub dc /的关系(RF和dc输入的漏极电导之比),这些结果表明,具有g / sub d /小频率色散的优化器件结构可用于实现高高速和高质量逻辑IC。

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