基于制作COF精细线路的液态光致抗蚀液性能研究

摘要

Liquid photoresist was printed on ultra thin and flexible copper-clad laminates by Roll to Roll silk-screen printing machine.Photosensitive property and resolution of liquid photoresist were studied and effects of COF fine lines were investigated.The resu%卷对卷丝网印刷机在超薄挠性覆铜箔层压板上丝网印刷液态光致抗蚀液,实现COF精细线路的制作。研究了液态光致抗蚀液的感光性能与分辨率力等性能,考察了制作出COF的线路效果。实验结果表明,液态光致抗蚀液网印的针孔数随厚度的减小而增加,液态光致抗蚀剂曝光级数随曝光能量的变化趋势与干膜是一致的,11μm厚液态光致抗蚀剂分辨的最小线路宽达到25μm,满足COF精细线路制作的要求。