浅谈硫酸双氧水微蚀速率

摘要

The paper mainly introduced the microetch techniques of sulfuric acid and hydrogen peroxide.The parameters of this technology also have been expounded.%主要探讨硫酸双氧水微蚀工艺的微蚀速率,详细讲述了该工艺条件下的工艺参数控制。