光互连背板的发展现状

摘要

文章概述了光互连背板的发展现状和应用前景，着重介绍了光互连背板的关键材料光波导及其性能指标、加工工艺，并列举了几个重要的光互连背板相关研究工作。%This article reviewed the development of the optical backplanes, and introduced the interested materials waveguides, including their properties index which related to their performance, and the fabricating process. Several worldwide works were also liOptical interconnects; backplanes; waveguide; UV exposure.-sted here.