电液动力微泵微电极的不同制作工艺的比较

摘要

The fabrication and design of micro-electrodes(the key component of Electrohydrodynamic(EHD) micropump) using MEMS technology are studied in this paper. The main part of the EHD micropump is a planar electrode array composed of electrode pairs made of the emitter and the collector. The electrohydrodynamic (EHD) pump uses the interaction between an electric field and electric charges, dipoles or particles embedded in a dielectric fluid to drive the fluid. The major key-controlling variables including the selection of electrode materials, diversification of electrode geometrical design, comparison of different fabrication processes, electroplating and kit-off process are analyzed systematically.The experimental results show that noble metals have good performance of resistance for corrosion electrochemical processes, and the electrode with sharp geometry can improve the performance of micropump. It also shows that kit-off process is better than electroplating process in electrode quality.%基于MEMS加工技术的电液动力微泵在微流体冷却系统和解决高热流器件的冷却问题中占有重要地位.电液动力微泵的核心部分是通过MEMS加工工艺制作的由成对的发射极和集电极组成的微电极.在电极对间的强电场作用下,电介质流体中的离子、极子以及微粒同电场相互作用来驱动流体流动.本文系统地讨论了微电极在设计和制作中需要关注的问题:电极材料的选择方针,多种形状的电极设计和两种电极加工工艺-电镀法和剥离法的对比.实验结果表明:贵金属有更好的抗电化腐蚀能力;同普通平行电极结构相比,带有尖锐结构的电极更能提高微泵的性能;相比电镀法,剥离法能更好地提高电极的制作质量.