Wafer-level and highly controllable fabricated silicon nanowire transistor arrays on （111） silicon-on-insulator （SOl） wafers for highly sensitive detection in liquid and gaseous environments

著录项

• 来源
  《纳米研究：英文版》 |2018年第3期|P.1520-1529|共10页
• 作者

  Xun Yang12; Anran Gao1; Yuelin Wang1; Tie Li1;

  展开▼
• 作者单位

  [1]Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, ChineseAcademy of Sciences, Shanghai200050, China;

  [2]University of Chinese Academy of Sciences （UCAS）, Beijing 100190, China;

  [1]Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, ChineseAcademy of Sciences, Shanghai200050, China;

  [1]Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, ChineseAcademy of Sciences, Shanghai200050, China;

  [1]Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, ChineseAcademy of Sciences, Shanghai200050, China;

  展开▼
• 原文格式 PDF
• 正文语种 CHI
• 中图分类 半导体三极管（晶体管）;
• 关键词

  晶体管; 数组; 晶片; 制作; 控制; 敏感; 环境; 气体;

  机译：晶体管;数组;晶片;制作;控制;敏感;环境;气体;