EACVD 一体化系统衬底温度控制研究

摘要

According to the requirement for the temperature in the deposition of the diamond ,a fuzzy-PID compound control meth-od was established in the integration Electron-Assisted Chemical Vapor Deposition ( EACVD) system.The experiment of CVD dia-mond deposition shows that the process parameters can be accurately controlled and the system can apply stable long -term opera-tion.It can be used for the deposition of high quality CVD diamond coating .%以电子辅助热丝化学气相沉积（Electron-assisted Chemical Vapor Deposition，EACVD）一体化系统为研究对象，根据金刚石沉积过程中对衬底温度的要求，设计了模糊PID衬底温度控制系统。使用结果表明：该系统对化学气相沉积（ CVD）金刚石的衬底温度参数控制精确，能够长时间稳定运行，可以制备出高质量的CVD金刚石涂层。