AlxGa1-xAs材料低Al组分PL测试技术的研究

摘要

采用激光显微光致发光(PL)光谱仪测试了低Al组分AlxGal-xAs的室温显微光致发光谱,研究了光致发光测试方法的特点,结合文献中报道的低Al组分的经验计算公式,自主开发了能进行光谱数据处理和Al组分计算的VB应用程序,目前已进入实用化.结果显示,该程序的开发和应用是获取低Al组分AlxGa1-xAs材料Al组分的非常重要的表征手段,并为研究和优化AlxGa1-xAs材料生长工艺提供指导,同时还成为筛选用于制作器件工艺合格材料的重要依据.%At room temperature micro-photoluminescence spectra of the low Al composition AlxGa1-xAs was tested by laser micro-photoluminescence spectroscopy.The characteristic of photoluminescence test method was studied,and combining with experience calculate expressions of the low Al composition in literature,independent development VB application program for spectra data processing and Al composition calculate has entered on practicality now.The results show that exploiture and application of program is an important characterization instrument for obtaining a Al composition of low Al composition Alx Ga1-x As materials,and provides direction for study and optimization growth technology of Alx Ga1-x As materials,and it has become a important gist for filter eligible materials in making device technology.