高精度自动化水平基准装置中微米级微位移平台的应用

摘要

A high-accuracy horizontal benchmark standard installment is very important for verification of instrument of surveying and metering. At present, the debugging of high-accuracy horizontal benchmark installment is men-made, which wastes much time and with large error. A method of automatically debugging is presented, and the application of micron-sized micro translation stages to leveling process and appraisal of measurement system precision have been elaborated.%针对高精度水平基准装置人工调试时人为误差大,费时费力等实际,提出一种自动调平方法.