Improved Design and Modeling of Micromachined Tuning Fork Gyroscope Characterized by High Quality Factor

摘要

This paper proposes an improved design of micromachined tuning fork gyroscope （M-TFG） to decouple the cross talk between driving and sensing directions better and to increase resolution.By employing dual-folds spring suspension,the drive mode and the sense mode are mechanically decoupled.Through careful layout design of the location of the dual-folds spring suspension and the drive combs,the mechanical coupling effect is further decreased by isolating the unwanted excitation from detection.The quality factor investigation demonstrates that high quality factor can be attained by using this structure,which can bring in accurate resolution.As a result,this design has the potential to accomplish low bias drift and accurate resolution for initial level applications.