MTM反熔丝单元的总剂量效应研究

摘要

The paper focused on the result of single MTM anti-fuse unit when TID (Total Ion Dose) experiment. Just like in the actually application environment, applied the different bias on the different sizes and states of MTM anti-fuse units when it is in the TID environment, and got the data trend of feature character. Then, we got the conclusion: the logic state of MTM anti-fuse unit can’t be influenced by TID.%对单个MTM（Metal-to-Metal）反熔丝单元的总剂量辐照效应进行了研究，模拟可编程器件实际应用环境，通过对不同尺寸、不同状态的MTM反熔丝单元在不同的偏置情况下进行总剂量辐照（总剂量达2 Mrad(Si)），得到MTM反熔丝单元关键参数随总剂量的变化情况。通过实验及数据分析，最终得到结论：MTM反熔丝单元不会因总剂量辐照而发生状态翻转。