超小间距纳米柱阵列中的谐振调制

摘要

本文首先研究了具有通常柱间距(大于100 nm)的纳米柱阵列在近红外波段的光学特性并实现了通过改变阵列参数(如周期)来调制局域表面等离子体谐振。随后,通过使用电子束直写和离子束刻蚀的方法制备出具有超小柱间距(小于50 nm)和超高密度(ultrahigh density)的纳米柱阵列并通过对表面等离子体谐振的调制实现了在可见光波段滤出不同颜色的单色光。本文中所展示的纳米柱功能阵列可以与现有的数字光处理(digital light processing, DLP)技术相兼容进而构造具有超小像素的显示屏,可以在显示、成像等领域取得广泛的应用。%In this work, we first investigate the optical properties of nanorod arrays with normal inter-rod spacing (>100 nm) and realize the tuning of nanorod localized surface plasma resonance (LSPR) by changing array parameters (e.g., periodicity). Then we filter our individual colors in the visible range using nanorod arrays with ultrasmall inter-rod spacing and ultrahigh density fabricated by electron beam lithography (EBL) and ion etching. The functional nanorod arrays developed in this work are compatible with current digital light processing technique, enabling screen with ultrasmall pixels which can find extensive applications in display and imaging.