Thermal Error Modeling of Precision Positioning Stage

摘要

As the thermal deformation significantly impacts the accuracy of precision positioning stage, it is necessary to realize the thermal error. The thermal deformation of the positioning stage is simulated by the finite element analysis. The relationship between the temperature variation and thermal error is fitted third-order polynomial function whose parameters are determined by genetic algorithm neural network (GANN). The operators of the GANN are optimized through a parametric study. The results show that the model can describe the relationship between the temperature and thermal deformation well.