Research on all-solid state rechargeable thin film Li -batteries has received considerable attention recently. These rechargeable Li-batteries are potentially useful as power sources for computer-chip backups, sensors in micromechanics, hazard cards and other low power devices. Thin film Li-batteries with a lilliium anode, an amorphous inorganic Li* ion-conducting electrolyte and different kind of cathode has been fabricated layer by layer using vacuum deposition techniques. In recent years pulsed laser deposition( PLD) has been used for the fabrication of thin film electrodes and has been successfully used to prepare LiCoO2, LiMn2O4 and V2O5 thin films.
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