Coating Process for MEMS Based 3-axis Force Sensors

摘要

The present paper discusses an experimental procedure for designing a suitable coating for Microelectromechanical systems (MEMs) based 3-axis force sensors. Several coating shapes, sizes and materials were tested. The coated sensors were calibrated and tested in order to characterize the effect of the coating on the sensor characteristics such as measurement dynamic range and resolution, the linearity of the response, as well as the impulse response of the system. Finally guidelines for optimal coating of the sensor are proposed.