Progress in Design and Fabrication of Resonator Quantum Well Infrared Photodetectors (R-QWIP)

摘要

Resonator-Quantum Well Infrared Photo detectors (R-QWIPs) are the next generation of QWIP detectors that use resonances to increase the quantum efficiency (QE). Collaborating with L-3 Communications - Cincinnati Electronics, recently we explore R-QWIPs for long wavelength applications. By using our two optimized inductively coupled plasma (ICP) etching processes, two format (1K×1K and 40×40) R-QWIP detectors were fabricated successfully. We achieved a quantum efficiency of 37% for 19 quantum wells and 35% for 8 quantum wells under a doping density of 0.5 × 10~(18) cm~(-3). The cutoff wavelength and bandwidth of both detectors are 10.5 μm and 2 μm respectively. The thermal sensitivity of the large format FPA is 27.2 mK at half well-fill (Nw/2) of 8.85 M electrons and intergration time of 4.46 ms under F/2.5 optics.