Surface Acoustic Wave Sensors for Fine Particle Detection Air Quality Monitoring

摘要

Surface acoustic wave (SAW) sensors consisting of delay lines built on Quartz are used for fine particle detection. Sensors based on either Rayleigh or Love waves using different guiding layers such as silica and resin were tested. A comparison of these different sensors capabilities has been achieved. Our SAW sensors proved to be able to detect PM10 and PM2.5 particles in the 0 - 100 μg/m~3 concentration range. The influence of the guiding layer thickness on the Love wave sensors sensitivity was also investigated.