Silicon Based Temperature Sensors with Extended Temperature Range and Simple One-Point Calibration

摘要

Temperature is the most important parameter to be measured in industry, automation, environment and many other fields. Almost any silicon diode can be used as a temperature transducer. Its main advantages are the high precision and the high long-term stability while the drawbacks are the limited operation temperature and the parameter spread due to fabrication uncertainties. We propose a dedicated fabrication technology for silicon-based temperature diodes, specifically designed and optimized to overcome these limitations. It is designed for higher temperature sensing applications where simple calibration, high accuracy and high long-term stability are most important. We demonstrate test results to evaluate the obtained process stability and discuss potential application fields in hybrid multi-sensor systems and more complex feedback-based sensor-actor systems.