Bridge Type Hydrogen Sensor Using Platinum Ultrathin film

摘要

The resistance of platinum thin-film was reduced by carrier density increment in the presence of hydrogen gas. The resistance change depended on the thickness of the platinum. Using these phenomena, a bridge-type hydrogen sensor, which converted this resistance change into a voltage change, was developed. The developed sensor was able to detect hydrogen at room temperature. Furthermore, we suggest a method in which the response and recovery time is accelerated by applying a pulse voltage to the sensor. The developed sensor can use DC and AC voltage as the driving power source.