A Disc-shaped Power Supply Line-free Mass Sensor for Measuring Biomarker

摘要

The purpose of this research is to demonstrate a new design for a mass sensor with a disc-shaped resonator that is free of power supply lines. The line-free mass sensor comprises a resonator and a piezoelectric element for vibrating it. Since electrical power is used to actuate the piezoelectric element, the resonator is free from power lines. Target molecules become attached to the resonator, changing its resonant frequency. The geometric shape and dimensions of the resonator were designed using the finite element method (FEM). The resonator was fabricated in the shape of a circular plate of diameter 4 mm by photolithography, so that the radial oscillation primary mode of vibration would be 3.68 MHz. The concentrations of glucose solutions were measured using the line-free mass sensor. The sensitivity of the line-free mass sensor was estimated to be 0.06 fg when a frequency resolution of 1 mHz was used.