Design of Functional Devices With Resonant Filter With A Simple Sonic Crystal Structures

摘要

In this paper, we study propagation characteristics of surface acoustic wave (SAW) in structural array. We use focus ion beam (FIB) lithography as a fabrication process of structural array. We fabricated test devices with the structural array which formed by metal deposition and etching by using FIB process, respectively, in order to investigate SAW propagation. The experimental results show the stop-band characteristics and the pass-band characteristics. We try to clarify a feasibility of the SAW functional devices with structural array, such as an opt-acoustic integrated device.