A High Symmetry Polysilicon Micro Hemispherical Resonating Gyroscope with Spherical Electrodes

摘要

This paper presents a highly symmetric micro-scale hemispherical resonator gyroscope (HRG) made of polysilicon with spherical electrodes. The spherical electrodes enhance transduction area (1.1 mm~2). Meanwhile, the gyroscope has small gap size (1.8 μm) between electrodes and resonators. These two features enable mode match operation of the resonator with low voltage supply. The quality factor of the wineglass mode is measured to be 22000 at 14184 Hz with a frequency split of 10 Hz between the two n = 2 degenerate modes. The frequency split can be minimized from 0.07% to 0.003% (0.51 Hz) by applying low tuning voltages of 2 V and 1.6 V on the electrodes of 22.5° and 45°, respectively, which would significantly reduce power supply and simplify the circuit of the high-performance HRG.