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XPS STUDY OF THIN FILMS OF BINARY METAL OXIDES FOR GAS-SENSING APPLICATIONS

机译:用于气体传感的二元金属氧化物薄膜的XPS研究

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The chemical composition of the thin films of mixed metal oxides (Sn-W, Mo-Sn and Mo-Ti), prepared by magnetron sputtering and by sol-gel, were investigated by standard and angle-resolved XPS depth profiling techniques. Starting from the stoichiometric compounds on the surface and going deeper into the volume of the films, the depth profiles revealed there the presence of reduced metal ions. The possible contribution of sputtering-induced reduction of the oxides, interchange redox reactions between two metal ions in these compounds, influence of sputtering ion energy and photoelectron collection angle are discussed on the basis of obtained experimental results.
机译:通过标准和角度分辨XPS深度剖析技术研究了通过磁控溅射和溶胶-凝胶法制备的混合金属氧化物(Sn-W,Mo-Sn和Mo-Ti)薄膜的化学成分。从表面上的化学计量化合物开始,并深入到膜的体积中,深度分布图表明存在还原的金属离子。在获得的实验结果的基础上,讨论了溅射诱导的氧化物还原的可能的贡献,这些化合物中两种金属离子之间的互换氧化还原反应,溅射离子能量的影响以及光电子收集角的影响。

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