Abstract: Micromechanical elements analysis require the local approach to their behavior and material constants. In the paper the automated grating microinterferometer GMI for in-plane displacement/strain measurement in a region smaller than 1 $MUL 1 mm$+2$/ is presented. It is based on the concept of achromatic grating interferometer combined with glass block waveguide and designed for the work with standard optical microscopes. The interferogram obtained may be modified and design for both temporal and carrier frequency phase shifting methods. The methodology of measurement is described and the example of GMI application is given. !8
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机译：摘要：微机械元素分析需要采用局部方法来研究其行为和材料常数。在本文中，提出了一种自动光栅微干涉仪GMI，用于在小于1 $ MUL 1 mm $ + 2 $ /的区域内进行平面内位移/应变测量。它基于与玻璃块波导相结合的消色差光栅干涉仪的概念，设计用于标准光学显微镜。可以修改所获得的干涉图，并针对时间和载波频率相移方法进行设计。描述了测量方法，并给出了GMI应用示例。 ！8
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