Abstract: Parallel and absolute measurement of surface profiles are realized on objects including diffuse surfaces and discontinuities such as steps and holes. Sensitivity and range of measurements have been examined by using a dye laser with tuning range of 4.2 nm. Their dependences on axial positions and tilt angle are investigated experimentally for diffuse objects and milled ones. A narrow dip and a screw head that cannot be measured by other methods could be analyzed by the present method. !8
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