Non-contact Sensing of Electric Potential using Electro-Luminescence Effects

摘要

A new voltage sensing method has been tried using an electro-luminescence effect. Optical images of the electric potential of conductive planar patterns could be obtained by this method. The brightness of the sensor surface is proportional to the voltage that is applied to the pattern electrode and the image is captured. By processing the image, defective part of the pattern electrode can be identified. This method is contact-free so that it can be applied to what is covered by an insulator layer. Also, we propose a driving method of the sensor that enables measuring DC voltages. This method may be applied to inspect the fine conductive patterns in non-contacting way during the fabrication process of display devices such as thin film transistor liquid crystal display (TFT-LCD) panels.